Advanced MEMS-Based Micro-Sensing Technologies for Precision Biomedical Applications

Abstract

The rising need of the compact, high-precision and energy-efficient biomedical monitoring systems has promoted critical advancements in the Micro-Electro-Mechanical Systems (MEMS) technology. The paper includes the detailed description of the design, fabrication, and characterization of micro-sensors, based on MEMS, with the optimal part of its characterization performed in real-time conditions. By exploiting such vital body functions as cardiovascular pressure, glucose level, and nerve impulse activity, the envisioned sensors are based on a hybrid fabrication approach that complements silicon micromachining with biocompatible polymer sandwiching. The strategy not only improves the mechanical sturdiness but also the biostability of longer periods in a physiological setting. The performance tests show significant sensitivity (e.g. 0.012 mV/Pa pressure sensor) and sub-millisecond response (<1 ms), and signal fidelity over prolonged periods of time. Their use case is applicable both to wearable and implantable, as integration to a custom-developed embedded hardware platform, enables real-time data acquisition, processing, and wireless transmission. A comparative benchmark with state-of-the-art sensor systems infers significant advancements in signal-to-noise ratio (SNR), energy events and miniaturization, setting a benchmark on the next generation of smart health care diagnostics. The findings support the opportunities of MEMS micro-sensing platforms to lead to innovations in personalized and precision medicine, mostly in the health monitoring of conditions perpetually, the early detection of diseases, and neurophysiology interfacing. The work provides a basis to combinational functional AI-enabled diagnostic systems and bioelectronic interface in the future with MEMS sensors.The technology has a potential massive use in personalized real-time healthcare systems.